In high-end manufacturing fields such as precision optical components, semiconductor parts, and high-precision molds, mirror polishing is a key process to ensure surface finish, flatness and service performance of products. In actual production, the formation of micro-scratches, pits and surface contaminants has become an important issue restricting the improvement of mirror polishing quality, as well as a technical difficulty urgently needing breakthroughs in equipment and process aspects.

The formation of micro-scratches is closely related to polishing media, environmental cleanliness and motion state. Agglomeration, hardening or inclusion of hard impurities in polishing abrasives during high-speed movement will form fine scratches on the workpiece surface. These defects are small in size and concealed in distribution, difficult to be completely identified by conventional detection methods, but will significantly reduce surface structure integrity, cause stress concentration in subsequent assembly, and affect product life and reliability.

Pit defects mainly result from uneven local grinding and unbalanced chemical action. Factors such as uneven polishing pressure distribution, unstable polishing fluid supply and excessive local temperature will cause irregular point-like depressions on the workpiece surface, destroy mirror continuity, reduce optical reflection and transmission effects, and fail to meet the use requirements of high-precision scenarios.

Meanwhile, surface contamination caused by polishing residues is also prominent. Abrasive debris, colloidal substances and chemical additives produced during polishing, if not discharged timely and effectively, are easy to adhere to the workpiece surface and form stubborn residues. Traditional mirror polishing machines have limited flushing and chip removal capabilities, easily causing secondary scratches and contamination, further reducing product yield.

Overall, micro-scratches, pits and polishing residues not only directly affect appearance quality, but also reduce workpiece precision and reliability, increasing rework and scrap costs. To effectively control such defects, comprehensive measures need to be taken from abrasive optimization, polishing pad structure improvement, real-time cleaning system upgrade and closed-loop regulation of process parameters, so as to improve the stability and cleanliness of the mirror polishing process from the source and provide reliable surface treatment guarantee for high-end precision manufacturing.