This machine is a large-scale optical thin film coater for anti- smudge(AS), anti-reflection(AR), and AS+AR coatings.
FEATURES:
1.Excellent uniformity by the center drive substrate rotation system.
2.RF ion source to enhance abrasion resistance (subject to more than forty thousand abrasion test*)
3.Mass production for AS coating.
* The cycles of abrasion can be varied according to standard of wear resistance test.
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Specifications of Gener-2314
|
Chamber Size |
φ2350 mm × H1400 mm |
|
Substrate Dome |
φ2200 mm, Five-sectional |
|
Max. Dome Rotation Speed |
20 rpm |
|
Crystal Film Thickness Monitor |
6-point Crystal flim monitor |
|
Evaporation Source |
One unit of EB source, Movable AS source |
|
Ion Source |
RF Ion Source |
|
Performance |
|
|
Ultimate Pressure |
7.0E-5 Pa or lower |
|
Pumping Speed |
15 min (from atmospheric pressure to 2.0 × 10-3 Pa） |
|
Utility Requirements |
|
|
Footprint |
6300 (W) × 9000 (D) × 4000 mm (H) |
|
Power Supply |
3-phase, 200 V, 50/60 Hz, 80 kVA, approx. |
|
Minimum Water Flow |
220 Q /min |
|
Air Pressure |
0.5 - 0.7 MPa |
|
Weight |
12000kg, approx. |
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