Mirror polishing machines achieve a mirror finish with a surface roughness of Ra≤0.001μm through the synergistic effect of physical grinding and chemical polishing.
In terms of processable materials and technical implementation, the equipment is suitable for various precision materials:
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Semiconductor Materials: Such as monocrystalline silicon and silicon carbide wafers. Through the mechanical cutting of diamond grinding fluid and the chemical corrosion of alkaline polishing fluid, the damaged layer on the wafer surface is removed to obtain an ultra-flat mirror surface, providing a foundation for the lithography process.
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Ceramic Materials: Including alumina ceramics and silicon nitride ceramics. Using a soft polishing pad combined with colloidal silica polishing fluid, the ceramic surface is mirror-finished through mechanical grinding and chemical passivation of micro-nano particles, improving its wear resistance and insulation.
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Metal Materials: Such as tungsten alloy and titanium alloy precision components. Utilizing diamond composite polishing fluid combined with controllable polishing pressure and speed, machining marks on the metal surface are eliminated to form a mirror finish.
In terms of industry applications and key roles:
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Semiconductor Industry: The mirror polishing machine is the core equipment for wafer manufacturing; its processing accuracy directly determines the yield and performance of the chip.
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Electronic Ceramics Industry: It is used for preparing mirror surfaces for ceramic substrates and packaging shells to ensure the heat dissipation efficiency and insulation reliability of electronic components.
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Precision Machinery Industry: It performs mirror polishing on hydraulic valve cores and metal parts of optical instruments to reduce the surface friction coefficient and improve the equipment's sealing performance and motion precision.
The
mirror polishing machine achieves ultra-precision surface processing of different materials by precisely controlling parameters such as polishing pressure, speed, and polishing fluid ratio, providing a key surface treatment solution for the high-end manufacturing field.
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